Amplification method for photoresist exposure in semiconductor chip manufacturing

ABSTRACT

An electrical field is applied through an extreme ultraviolet (EUV) photoresist layer along a direction perpendicular to an interface between the EUV photoresist layer and an underlying layer. Secondary electrons and thermal electrons are accelerated along the direction of the electrical field, and travel with directionality before interacting with the photoresist material for a chemical reaction. The directionality increases the efficiency of electron photoacid capture, reducing the required EUV dose for exposure. Furthermore, this directionality reduces lateral diffusion of the secondary and thermal electrons, and thereby reduces blurring of the image and improves the image resolution of feature edges formed in the EUV photoresist layer. The electrical field may be generated by applying a direct current (DC) and/or alternating current (AC) bias voltage across an electrostatic chuck and a conductive plate placed over the EUV photoresist layer with a hole for passing the EUV radiation through.

BACKGROUND

The present disclosure relates to a method of exposing an extremeultraviolet (EUV) photoresist, and an apparatus for implementing thesame.

Extreme ultraviolet lithography is a lithography technology using anextreme ultraviolet (EUV) wavelength radiation for exposure. As usedherein, EUV refers to a range of electromagnetic radiation having awavelength from 10 nm to 50 nm. When an EUV photon is absorbed in aphotoresist, at least one photoelectron, secondary electrons, andthermal electrons are generated by ionization. The photoelectrons aregenerated as a direct result of a photon-matter interaction between theEUV photon and the matter in the photoresist layer. The secondaryelectrons are caused by collision of the photoelectron with additionalelectrons as the photoelectron travels through the photoresist material.The thermal electrons are derived from the photoelectrons or thesecondary electrons due to their energy loss or due to collisions thattransfer energy less than about 2.5 eV.

EUV photoresist exposure (on a semiconductor wafer) is typicallyaccomplished by generating photoelectrons within a photoresist layer.Upon generation, the photoelectrons do not have controlleddirectionality. As a result, feature edges defined by an EUV exposureare variable and dependent upon the path of the secondary electrons,their inelastic collisions, the resultant thermalization that ultimatelydrives the decomposition of the photoacid generator (PAG) within thephotoresist, and the resist polymer/molecular distribution andhomogeneity for reaction sites.

Thermalized electrons are estimated to have a mean free path of about 2nm to 5 nm. Currently, the imaged feature edge roughness, as well asresolution of the minimum feature size, is insufficient for EUVlithography to be able to achieve the required performance forutilization in semiconductor manufacturing. To date, high volumesemiconductor wafer exposure tooling has not had to addressphotoelectron directionality, as the resist exposure has been a photoninduced reaction.

SUMMARY

An electrical field is applied through an extreme ultraviolet (EUV)photoresist layer along a direction perpendicular to an interfacebetween the EUV photoresist layer and an underlying layer. Secondaryelectrons and thermal electrons are accelerated along the direction ofthe electrical field, and travel with directionality before interactingwith the photoresist material for a chemical reaction. Thedirectionality reduces lateral diffusion of the secondary and thermalelectrons, and thereby reduces blurring of the image and improves theimage resolution of feature edges formed in the EUV photoresist layer.The electrical field may be generated by applying a direct current (DC)and/or alternating current (AC) bias voltage across an electrostaticchuck on which a substrate with the EUV photoresist layer is mounted anda conductive plate placed over the EUV photoresist layer with a hole forpassing the EUV radiation through.

According to an aspect of the present disclosure, a method oflithographically exposing an extreme ultraviolet (EUV) photoresist layeris provided. A substrate with an EUV photoresist layer thereupon isdisposed on an electrically conductive chuck in a vacuum enclosure. Aconductive plate with a hole therein is disposed over the EUVphotoresist layer. The EUV photoresist layer is lithographically exposedby irradiating portions of the EUV photoresist layer with an EUVradiation through the hole in the conductive plate while an electricalfield is applied across the conductive plate and the conductive chuck.

According to another aspect of the present disclosure, an apparatus forlithographically exposing an extreme ultraviolet (EUV) photoresist layeris provided. The apparatus includes an electrically conductive chuckconfigured to hold a substrate with an EUV photoresist layer thereuponand located in a vacuum enclosure, and an EUV radiation sourceconfigured to emit an EUV radiation. The apparatus further includes aconductive plate with a hole therein and located over the electricallyconductive chuck. The hole is located in a beam path of the EUVradiation. The apparatus further includes an electrical bias voltagesource and a set of conductive structures configured to supply anelectrical bias voltage across the electrically conductive chuck and theconductive plate.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

FIG. 1 is a schematic cross-sectional view of an exemplary extremeultraviolet (EUV) lithography apparatus according to an embodiment ofthe present disclosure.

FIG. 2 is a schematic illustration of a comparative exemplarylithographic exposure process.

FIG. 3 is a schematic illustration of an exemplary lithographic exposureprocess according to an embodiment of the present disclosure.

DETAILED DESCRIPTION

As stated above, the present disclosure relates to a method of exposingan extreme ultraviolet (EUV) photoresist, and an apparatus forimplementing the same. Aspects of the present disclosure are nowdescribed in detail with accompanying figures. Throughout the drawings,the same reference numerals or letters are used to designate like orequivalent elements. The drawings are not necessarily drawn to scale.

During conventional extreme ultraviolet (EUV) lithography, a majority ofsecondary electrons is lost in non-imaging layers due to poor absorptionin an imaging layer, i.e., the EUV photoresist layer. The loss of thesecondary electrons in the non-imaging layers is responsible for therequirement for a high exposure dose in conventional EUV lithographytools.

According to an embodiment of the present disclosure, a direct current(DC) electrical bias, an alternating current (AC) electrical bias, or acombination of a DC electrical bias and an AC electrical bias is appliedwithin an imaging layer of an EUV lithography system. Specifically, anelectrical field in a direction normal to the interface between asubstrate and an EUV photoresist layer is applied through the EUVphotoresist layer to induce movement of secondary electrons within theEUV photoresist layer in regions illuminated with an EUV radiation.

An exemplary extreme ultraviolet (EUV) lithography apparatus, i.e., anexemplary EUV “scanner,” which can be employed in the presentdisclosure, is illustrated in FIG. 1 includes a vacuum enclosure.Components of the apparatus within the vacuum enclosure include an EUVsource configured to emit an EUV radiation (i.e., an “EUV beam”), a setof lenses configured to focus an EUV beam on an EUV photoresist layerapplied to a top surface of a substrate, an EUV mask that includeslithographic patterns to be transferred into each lithographicallyexposed portion of the EUV photoresist layer, an electrically conductivechuck configured to hold the substrate, a movable stage configured tomove in directions perpendicular to the portion of the EUV beam thatimpinges onto the EUV photoresist layer, a conductive plate with a holetherein so as to pass the portion of the EUV beam that impinges onto theEUV photoresist layer through, and means for generating and applying anelectrical voltage bias across the electrostatic chuck and theconductive plate with the hole therein. As used herein, an electricallyconductive chuck refers to a chuck having a conductive componentconfigured to be electrically shorted to a substrate that is mountedthereupon.

Because the space between the EUV photoresist layer and the conductiveplate is under vacuum, the electrical bias between the electrostaticchuck and the conductive plate can be applied without forming a plasma.In one embodiment, the vacuum environment within the vacuum enclosurecan be high vacuum environment. As used herein, “high vacuum”environment refers to a vacuum environment in which the pressure is in arange from 100 mPa (7.6×10⁻⁴ Torr) to 100 nPa (7.6×10⁻¹⁰ Torr).

The electrically conductive chuck is configured to hold the substratewith an EUV photoresist layer thereupon. In one embodiment, theelectrostatic chuck can be any type electrostatic chuck known in the artprovided that the electrostatic chuck can be mounted onto the movablestage and is connected to an output node of the means for generating andapplying the electrical voltage bias. The EUV radiation source may beany type of EUV radiation source known in the art provided that the EUVradiation source emits the EUV beam into the vacuum enclosure.

The conductive plate with the hole is located over the electricallyconductive chuck. The hole in the conductive plate is located in theportion of the beam path of the EUV radiation that impinges directlyonto the EUV photoresist layer (without any additional reflection at alens). The size of the hole is selected to be greater than the lateralextent of the EUV beam that passes through the hole. Thus, theconductive plate does not block any portion of the EUV beam. In oneembodiment, the lateral extent of the EUV beam at the surface of the EUVphotoresist layer can be the same as the size of a semiconductor chip tobe printed, and the lateral extent of the portion of the EUV beam thatpasses through the hole in the conductive plate can be proportionallygreater than the lateral extent of the EUV beam at the surface of theEUV photoresist layer by the geometrical factor by which an imagereduction takes place between the portion of the EUV beam through thehole and the portion of the EUV beam at the EUV photoresist layer. Thegeometrical factor can have a value greater than 1 and less than 3. Inone embodiment, the lateral extent (e.g., the diameter of a circularshape or a side of a square shape or a shorter side of a rectangle) ofthe hole can be from 3 mm to 30 mm, although lesser and greater lateraldimensions can also be employed. In one embodiment, the conductive platecan include no more than a single hole therein for passing the EUV beamtherethrough.

In one embodiment, the conductive plate can be configured to be spacedfrom a proximal surface of the EUV photoresist layer by a spacing in arange from 0.2 mm to 5.0 mm. As used herein, a “proximal” surface of theEUV photoresist layer refers to the surface of the EUV photoresist layerthat is most proximate to the conductive plate, and is identical to thetop surface of the EUV photoresist layer. Thus, the spacing between theelectrostatic chuck and the conductive plate can be set such that, uponmounting of a substrate with a photoresist layer thereupon on theelectrically conductive chuck, the spacing between the top surface ofthe EUV photoresist layer and the bottom surface of the conductive platecan be in a range from 0.2 mm to 5.0 mm, although lesser and greaterdistances can also be employed. In one embodiment, the spacing betweenthe top surface of the EUV photoresist layer and the bottom surface ofthe conductive plate can be in a range from 0.3 mm to 3.0 mm.

The means for generating and applying an electrical voltage bias acrossthe electrically conductive chuck and the conductive plate can includean electrical bias voltage source (represented by a square with a symbol“V” therein in FIG. 1) and a set of conductive structures. In oneembodiment, the set of conductive structures can be a set of conductivewires. The electrical bias voltage source can be configured to generatea DC voltage bias, an AC voltage bias, or a combination of a DC voltagebias and an AC voltage bias. The set of conductive structures connects afirst node of the electrical bias voltage source to the conductive plateand a second node of the electrical bias voltage source to theelectrically conductive chuck.

The electrical bias voltage source is configured to generate an electricfield, which can be a DC electric field, an AC electric field, or acombination of a DC electric field that applies a DC bias field and anAC electric field that applies a time-varying component. The electricfield can have a magnitude greater than 1 kV/cm during a time periodduring irradiation of the EUV radiation on the EUV photoresist layer.The time period can be 100% of the duration of the irradiation of theEUV radiation on the EUV photoresist layer, or can be a fraction of theduration of the irradiation of the EUV radiation on the EUV photoresistlayer that is less than 100%. In one embodiment, this fraction can be ina range from 1% to 99%.

In one embodiment, the electrical bias voltage source can be configuredto generate an electric field having a magnitude in a range from 1 kV/cmto 5 MV/cm during a time period during irradiation of the EUV radiationon the EUV photoresist layer. In another embodiment, the electrical biasvoltage source can be configured to generate an electric field having amagnitude greater than 1 kV/cm, 2 kV/cm, 5 kV/cm, 10 kV/cm, 20 kV/cm, 50kV/cm, or 100 kV/cm between the electrically conductive chuck and theconductive plate during a time period during irradiation of the EUVradiation on the EUV photoresist layer. Additionally or alternately, theelectrical bias voltage source can be configured to generate anelectrical field having a magnitude less than 5 MV/cm, 2 MV/cm, 1 MV/cm,500 kV/cm, 200 kV/cm, or 100 kV/cm between the electrically conductivechuck and the conductive plate during a time period during irradiationof the EUV radiation on the EUV photoresist layer.

In one embodiment, the electrical bias voltage source can be configuredto generate an electric field including a direct current (DC) electricalbias and an alternating current (AC) electric field having a peakelectrical field magnitude greater than 1 kV/cm. In another embodiment,the electrical bias voltage source can be configured to generate anelectric field having a peak electrical field magnitude greater than 1kV/cm, 2 kV/cm, 5 kV/cm, 10 kV/cm, 20 kV/cm, 50 kV/cm, or 100 kV/cmbetween the electrically conductive chuck and the conductive plate.Additionally or alternately, the electrical bias voltage source can beconfigured to generate an electrical field having a peak electricalfield magnitude less than 5 MV/cm, 2 MV/cm, 1 MV/cm, 500 kV/cm, 200kV/cm, or 100 kV/cm between the electrically conductive chuck and theconductive plate.

In one embodiment, the electrical bias voltage source can be configuredto generate an electric field that includes an alternating current (AC)electric field having a frequency in a range from 1 Hz to 10 GHz. Inanother embodiment, the electrical bias voltage source can be configuredto generate an electric field having a magnitude greater than 1 Hz, 10Hz, 100 Hz, 1 kHz, 10 kHz, 100 KHz, and 1 MHz between the electricallyconductive chuck and the conductive plate. Additionally or alternately,the electrical bias voltage source can be configured to generate anelectrical field having a frequency less than 10 GHz, 1 GHz, 100 MHz, 10MHz, 1 MHz, or 100 kHz between the electrically conductive chuck and theconductive plate.

In one embodiment, the movable stage is configured to move theconductive chuck and the substrate during irradiation of the EUVradiation on the EUV photoresist layer in a direction perpendicular to adirection of propagation of a portion of the EUV radiation that impingeson the EUV photoresist layer. If the direction along which the EUV beamimpinges onto the surface of the EUV substrate is along a z-direction ofa Cartesian coordinate system, the movable stage can be configured tomove along the x-direction and the y-direction of the Cartesiancoordinate system.

The optics system in the vacuum enclosure includes various minors thatare configured to focus the EUV radiation from the EUV source on the EUVphotoresist layer. A mask mounting apparatus is also provided within thevacuum enclosure. The mask mounting apparatus is configured to hold anEUV lithographic mask in the path of the EUV radiation so that the EUVbeam impinging on the EUV photoresist layer is patterned with alithographic pattern, i.e., the beam of the EUV radiation impinges onthe EUV photoresist layer with a lithographic pattern and cause portionsof the EUV photoresist layer to be illuminated and lithographicallyexposed while remaining portions of the EUV photoresist layer are notilluminated.

Optionally, hydrogen or another background gas may be supplied betweenthe top surface of the EUV photoresist layer and the conductive plate.In this case, the apparatus includes a hydrogen gas source and ahydrogen gas supply apparatus configured to supply hydrogen gas from thehydrogen gas source through a hydrogen supply tube to a region betweenthe conductive plate and the proximal surface of the EUV photoresistlayer.

FIG. 2 illustrates a comparative exemplary lithographic exposure processthat does not employ an electrical field in an EUV photoresist layer. Inthe comparative exemplary lithographic process, an EUV photoresist layer20 is applied over a top surface of a substrate 10. An EUV beamirradiates the illustrated portion of the EUV photoresist layer 20.Because the EUV photoresist layer 20 typically has a small effectivecross-sectional area for interacting with the EUV beam, a predominantportion of the EUV beam passes through the EUV photoresist layer 20 andinteracts with the material in the substrate 10.

Photons of the EUV beam interacts with the material of the EUVphotoresist layer 20 or the material of the substrate 10 at light-matterinteraction sites to generate secondary electrons 42. The secondaryelectrons 42 have a lesser energy than a photon energy of the EUV beam,which can have an energy from 24.8 eV to 124 eV. The secondary electrons42 interact with the molecules of the material of the EUV photoresistlayer 20 and trigger chemical changes therein. The secondary electrons42 gradually lose energy with each interaction with the molecules of thematerial of the EUV photoresist layer 20 or generation of additionalsecondary electrons 42. Once a secondary electron 42 loses enough energyso that the kinetic energy of the second electrons 42 falls below 2.5eV, the secondary electron becomes a thermal electron 44, which iseventually absorbed in the EUV photoresist layer 20 or in the substrate10.

Application of an electric field along the direction perpendicular tothe interface between the substrate 10 and the EUV photoresist layer 20alters the mechanism for movement of the secondary electrons 42 asillustrated in FIG. 3, which shows an exemplary lithographic exposureprocess according to an embodiment of the present disclosure.

In the exemplary lithographic exposure process, an EUV photoresist layer20 is applied on a substrate 10, for example, by spin coating or by anyother method known in the art for applying an EUV photoresist material.The substrate 10 with the EUV photoresist layer 20 thereupon is disposedupon an electrically conductive chuck in a vacuum enclosure asillustrated in FIG. 1.

A conductive plate with a hole therein is disposed over the EUVphotoresist layer 20 (See FIG. 1). The EUV photoresist layer 20 islithographically exposed by irradiating portions of the EUV photoresistlayer 20 with an EUV radiation through the hole in the conductive platewhile an electrical field is applied across the conductive plate and theconductive chuck. The electrical field is predominantly along thedirection perpendicular to a horizontal interface between the topsurface of the substrate 10 and the bottom surface of the EUVphotoresist layer 20. The electrical field can be applied employing themeans for generating and applying an electrical voltage bias across theelectrostatic chuck and the conductive plate with the hole therein asdescribed above. The conductive plate is spaced from a proximal surfaceof the EUV photoresist layer 20 by a spacing, which can be, for example,in a range from 0.2 mm to 5.0 mm as described above. Optionally,hydrogen gas may be supplied between the conductive plate and theproximal surface of the EUV photoresist layer 20.

The electrical field generated by the electrical bias voltage source canbe a DC electric field, an AC electric field, or a combination of a DCelectric field that applies a DC bias field and an AC electric fieldthat applies a time-varying component. The electric field can have amagnitude greater than 1 kV/cm during a time period during irradiationof the EUV radiation on the EUV photoresist layer. The time period canbe 100% of the duration of the irradiation of the EUV radiation on theEUV photoresist layer, or can be a fraction of the duration of theirradiation of the EUV radiation on the EUV photoresist layer that isless than 100%. In one embodiment, this fraction can be in a range from1% to 99%.

In one embodiment, the electrical field generated by the electrical biasvoltage source can have a magnitude in a range from 1 kV/cm to 5 MV/cmduring a time period during irradiation of the EUV radiation on the EUVphotoresist layer. In another embodiment, the electrical field generatedby the electrical bias voltage source can have a magnitude greater than1 kV/cm, 2 kV/cm, 5 kV/cm, 10 kV/cm, 20 kV/cm, 50 kV/cm, or 100 kV/cmbetween the electrically conductive chuck and the conductive plateduring a time period during irradiation of the EUV radiation on the EUVphotoresist layer. Additionally or alternately, the electrical fieldgenerated by the electrical bias voltage source can have a magnitudeless than 5 MV/cm, 2 MV/cm, 1 MV/cm, 500 kV/cm, 200 kV/cm, or 100 kV/cmbetween the electrically conductive chuck and the conductive plateduring a time period during irradiation of the EUV radiation on the EUVphotoresist layer.

In one embodiment, the electrical field generated by the electrical biasvoltage source can include a direct current (DC) electrical bias and analternating current (AC) electric field having a peak electrical fieldmagnitude greater than 1 kV/cm. In another embodiment, the electricalfield generated by the electrical bias voltage source can have a peakelectrical field magnitude greater than 1 kV/cm, 2 kV/cm, 5 kV/cm, 10kV/cm, 20 kV/cm, 50 kV/cm, or 100 kV/cm between the electricallyconductive chuck and the conductive plate. Additionally or alternately,the electrical field generated by the electrical bias voltage source canhave a peak electrical field magnitude less than 5 MV/cm, 2 MV/cm, 1MV/cm, 500 kV/cm, 200 kV/cm, or 100 kV/cm between the electricallyconductive chuck and the conductive plate.

In one embodiment, the electrical field generated by the electrical biasvoltage source can include an alternating current (AC) electric fieldhaving a frequency in a range from 1 Hz to 10 GHz. In anotherembodiment, the electrical field generated by the electrical biasvoltage source can have a magnitude greater than 1 Hz, 10 Hz, 100 Hz, 1kHz, 10 kHz, 100 KHz, and 1 MHz between the electrically conductivechuck and the conductive plate. Additionally or alternately, theelectrical field generated by the electrical bias voltage source canhave a frequency less than 10 GHz, 1 GHz, 100 MHz, 10 MHz, 1 MHz, or 100kHz between the electrically conductive chuck and the conductive plate.

In one embodiment, the conductive chuck and the substrate can be moved,i.e., stepped to a next exposure site, after irradiation of the EUVradiation on the EUV photoresist layer 20 for lithographic exposure ofanother area of the EUV photoresist layer.

The electrical field applied between the conductive plate and theelectrically conductive chuck causes the secondary electrons 42 to movealong the direction of the applied electrical field. Depending on therelative magnitudes of the applied DC electrical field (if non-zero) andthe applied AC electrical field (if non-zero), the net electrostaticforce applied to the secondary electrons 42 may, or may not, changedirections. Thus, the secondary electrons 42 may, or may not, change thedirection of travel from upward to downward or vice versa.

The addition of a vertical component of a velocity vector to thesecondary electrons 42 through application of the externally appliedelectrical field can cause reflection of normally lost secondaryelectrons from the substrate 10 or from above the top surface of the EUVphotoresist layer 20 back into the EUV photoresist layer 20. Thus, morephotoacid material within the EUV photoresist layer 20 interacts withthe secondary electrons 42 and changes chemical composition due to theadded vertical component of the velocity vector to the secondaryelectrons 42. The externally applied electrical field of embodiments ofthe present disclosure enables lithographic development of an EUVphotoresist layer 20 employing a less lithographic exposure time forinducing sufficient chemical reaction of photoacid materials inlithographically exposed regions than the comparative exemplarylithographic exposure process illustrated in FIG. 2.

Further, the addition of a vertical component of a velocity vector tothe secondary electrons 42 causes the secondary electrons to travelalong vertical directions and thus, reduces the lateral straggle of thesecondary electrons 42. The reduced lateral straggle of the secondaryelectrons 42 enables the lithographic exposure process according toembodiments of the present disclosure to generate a sharper lithographicimage than the comparative exemplary lithographic exposure processillustrated in FIG. 2.

While the disclosure has been described in terms of specificembodiments, it is evident in view of the foregoing description thatnumerous alternatives, modifications and variations will be apparent tothose skilled in the art. Each of the embodiments described herein canbe implemented individually or in combination with any other embodimentunless expressly stated otherwise or clearly incompatible. Accordingly,the disclosure is intended to encompass all such alternatives,modifications and variations which fall within the scope and spirit ofthe disclosure and the following claims.

What is claimed is:
 1. An apparatus for lithographically exposing anextreme ultraviolet (EUV) photoresist layer, said apparatus comprising:an electrically conductive chuck configured to hold a substrate with anEUV photoresist layer thereupon and located in a vacuum enclosure; anEUV radiation source configured to emit an EUV radiation; a conductiveplate with a hole therein and located over said electrically conductivechuck, wherein said hole is located in a beam path of said EUVradiation; and an electrical bias voltage source and a set of conductivestructures configured to supply an electrical bias voltage across saidelectrically conductive chuck and said conductive plate.
 2. Theapparatus of claim 1, wherein said conductive plate is configured to bespaced from a proximal surface of said EUV photoresist layer by aspacing in a range from 0.2 mm to 5.0 mm.
 3. The apparatus of claim 2,further comprising: a hydrogen gas source; and a hydrogen gas supplyapparatus configured to supply hydrogen gas from said hydrogen gassource through a hydrogen supply tube to a region between saidconductive plate and said proximal surface of said EUV photoresistlayer.
 4. The apparatus of claim 1, wherein said electrical bias voltagesource is configured to generate an electric field along a directperpendicular to a horizontal interface between a top surface of saidsubstrate and a bottom surface of said EUV photoresist layer during atime period during irradiation of said EUV radiation on said EUVphotoresist layer.
 5. The apparatus of claim 4, wherein said electricfield includes a direct current (DC) electric field having a magnitudegreater than 1 kV/cm.
 6. The apparatus of claim 5, wherein saidmagnitude is in a range from 10 kV/cm to 1 MV/cm.
 7. The apparatus ofclaim 4, wherein said electric field includes an alternating current(AC) electric field having a frequency greater than 1 Hz.
 8. Theapparatus of claim 7, wherein said frequency is in a range from 1 kHz to100 MHz.
 9. The apparatus of claim 4, wherein said electric fieldincludes a combination of a DC electrical field and an AC electric fieldhaving a peak electrical field magnitude greater than 1 kV/cm.
 10. Theapparatus of claim 4, wherein said time period of applying said electricfield has a value no greater than that of said irradiation of said EUVradiation on said EUV photoresist layer.
 11. The apparatus of claim 1,wherein said vacuum enclosure provides a high vacuum environment havinga pressure ranging from 100 mPa to 100 nPa.
 12. The apparatus of claim1, wherein a lateral extent of said hole in said conductive plate isgreater than a lateral extent of said beam of said EUV radiation. 13.The apparatus of claim 12, wherein said lateral extent of said hole insaid conductive plate ranges from 3 mm to 30 mm.
 14. The apparatus ofclaim 1, wherein said set of conductive structures comprises a set ofconductive wires.
 15. The apparatus of claim 1, further comprising amovable stage configured to move said conductive chuck and saidsubstrate during irradiation of said EUV radiation on said EUVphotoresist layer in a direction perpendicular to a direction ofpropagation of a portion of said EUV radiation that impinges on said EUVphotoresist layer.
 16. The apparatus of claim 1, further comprising: anoptics system configured to focus said EUV radiation on said EUVphotoresist layer; and a mask mounting apparatus configured to hold anEUV lithographic mask in a path of said EUV radiation.
 17. The apparatusof claim 16, wherein said EUV lithographic mask comprises lithographicpatterns to be transferred into said EUV photoresist layer.
 18. Theapparatus of claim 16, wherein said optics system comprises a set oflenses.